Element Edge Based Discretization for TCAD Device Simulation

نویسندگان

چکیده

Technology computer-aided design (TCAD) semiconductor device simulators solve partial differential equations (PDE) using the finite volume method (FVM), or related methods. While this approach has been in use over several decades, its methods continue to be extended, and are still applicable for investigating novel devices. In article, we present an element edge based (EEB) FVM discretization suitable capturing vector-field effects. Drawing from a 2-D literature, have extended 3-D. We implemented TCAD simulator, which uses generalized PDE (GPDE) simulate devices with FVM. describe how our EEB is compatible GPDE approach, allowing modeling of vector effects scripting. This applied polarization 3-D ferro capacitor ferroelectric field-effect transistor (FeFET). An example field-dependent mobility MOSFET also presented.

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ژورنال

عنوان ژورنال: IEEE Transactions on Electron Devices

سال: 2021

ISSN: ['0018-9383', '1557-9646']

DOI: https://doi.org/10.1109/ted.2021.3094776